Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084187 | Resist composition and pattern forming method using the same | Toru Tsuchihashi | 2011-12-27 |
| 8034547 | Pattern forming method, resist composition to be used in the pattern forming method, negative developing solution to be used in the pattern forming method and rinsing solution for negative development to be used in the pattern forming method | Hideaki Tsubaki, Shinji Tarutani, Kenji Wada, Wataru HOSHINO | 2011-10-11 |
| 8017304 | Pattern forming method, and resist composition, developer and rinsing solution used in the pattern forming method | Shinji Tarutani, Hideaki Tsubaki, Kenji Wada, Wataru HOSHINO | 2011-09-13 |
| 7989137 | Resist composition and pattern-forming method using the same | Shuji Hirano, Shinichi Sugiyama, Jiro Yokoyama | 2011-08-02 |
| 7923196 | Positive resist composition and pattern forming method using the same | Toru Tsuchihashi, Shuji Hirano, Jiro Yokoyama, Shinichi Sugiyama | 2011-04-12 |
| 7887988 | Positive resist composition and pattern forming method using the same | Kaoru Iwato, Kunihiko Kodama, Masaomi Makino | 2011-02-15 |