Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071272 | Method of forming patterns | — | 2011-12-06 |
| 8034547 | Pattern forming method, resist composition to be used in the pattern forming method, negative developing solution to be used in the pattern forming method and rinsing solution for negative development to be used in the pattern forming method | Shinji Tarutani, Kazuyoshi Mizutani, Kenji Wada, Wataru HOSHINO | 2011-10-11 |
| 8017298 | Method of forming patterns | — | 2011-09-13 |
| 8017304 | Pattern forming method, and resist composition, developer and rinsing solution used in the pattern forming method | Shinji Tarutani, Kazuyoshi Mizutani, Kenji Wada, Wataru HOSHINO | 2011-09-13 |
| 7998655 | Method of forming patterns | — | 2011-08-16 |
| 7985534 | Pattern forming method | — | 2011-07-26 |