Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034547 | Pattern forming method, resist composition to be used in the pattern forming method, negative developing solution to be used in the pattern forming method and rinsing solution for negative development to be used in the pattern forming method | Hideaki Tsubaki, Kazuyoshi Mizutani, Kenji Wada, Wataru HOSHINO | 2011-10-11 |
| 8017304 | Pattern forming method, and resist composition, developer and rinsing solution used in the pattern forming method | Hideaki Tsubaki, Kazuyoshi Mizutani, Kenji Wada, Wataru HOSHINO | 2011-09-13 |