Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989137 | Resist composition and pattern-forming method using the same | Shuji Hirano, Kazuyoshi Mizutani, Shinichi Sugiyama | 2011-08-02 |
| 7923196 | Positive resist composition and pattern forming method using the same | Toru Tsuchihashi, Kazuyoshi Mizutani, Shuji Hirano, Shinichi Sugiyama | 2011-04-12 |