Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043791 | Positive photosensitive composition, pattern forming method using the composition and resin for use in the composition | Yuko Tada, Kazuto Shimada | 2011-10-25 |
| 7989137 | Resist composition and pattern-forming method using the same | Kazuyoshi Mizutani, Shinichi Sugiyama, Jiro Yokoyama | 2011-08-02 |
| 7923196 | Positive resist composition and pattern forming method using the same | Toru Tsuchihashi, Kazuyoshi Mizutani, Jiro Yokoyama, Shinichi Sugiyama | 2011-04-12 |