Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8054467 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2011-11-08 |
| 7869022 | Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system | Johan Maria Van Boxmeer, Robert Franken | 2011-01-11 |