Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7869022 | Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system | Johan Maria Van Boxmeer, Henricus Petrus Maria Pellemans | 2011-01-11 |