Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062422 | Method and apparatus for generating a precursor for a semiconductor processing system | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2011-11-22 |
| 7943005 | Method and apparatus for photomask plasma etching | Ajay Kumar, Madhavi R. Chandrachood, Richard Lewington, Darin Bivens, Amitabh Sabharwal +1 more | 2011-05-17 |
| 7909961 | Method and apparatus for photomask plasma etching | Ajay Kumar, Madhavi R. Chandrachood, Richard Lewington, Darin Bivens, Amitabh Sabharwal +1 more | 2011-03-22 |