Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979954 | Inter-stage plasma source | Bill Quon | 2005-12-27 |
| 6960887 | Method and apparatus for tuning a plasma reactor chamber | Eric J. Strang, Robert Hostetler, Steven Fink | 2005-11-01 |
| 6949722 | Method and apparatus for active temperature control of susceptors | Eric J. Strang | 2005-09-27 |
| 6913703 | Method of adjusting the thickness of an electrode in a plasma processing system | Eric J. Strang, Thomas F. A. Bibby | 2005-07-05 |
| 6891124 | Method of wafer band-edge measurement using transmission spectroscopy and a process for controlling the temperature uniformity of a wafer | Medona B. Denton, Murray D. Sirkis | 2005-05-10 |
| 6863020 | Segmented electrode apparatus for plasma processing | Andrej Mitrovic | 2005-03-08 |
| 6861844 | Electron density measurement and plasma process control system using changes in the resonant frequency of an open resonator containing the plasma | Joseph T. Verdeyen, Murray D. Sirkis | 2005-03-01 |