Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962348 | Sealing apparatus having a single groove | — | 2005-11-08 |
| 6963043 | Asymmetrical focus ring | — | 2005-11-08 |
| 6960887 | Method and apparatus for tuning a plasma reactor chamber | Eric J. Strang, Wayne Johnson, Robert Hostetler | 2005-11-01 |
| 6942222 | Seal for sealing and load bearing a process tube in a vacuum system | — | 2005-09-13 |
| 6887341 | Plasma processing apparatus for spatial control of dissociation and ionization | Eric J. Strang, Paul Moroz | 2005-05-03 |