Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6887341 | Plasma processing apparatus for spatial control of dissociation and ionization | Eric J. Strang, Steven Fink | 2005-05-03 |
| 6868800 | Branching RF antennas and plasma processing apparatus | — | 2005-03-22 |