Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960887 | Method and apparatus for tuning a plasma reactor chamber | Wayne Johnson, Robert Hostetler, Steven Fink | 2005-11-01 |
| 6954077 | Apparatus and method for improving microwave coupling to a resonant cavity | — | 2005-10-11 |
| 6949722 | Method and apparatus for active temperature control of susceptors | Wayne Johnson | 2005-09-27 |
| 6913703 | Method of adjusting the thickness of an electrode in a plasma processing system | Thomas F. A. Bibby, Wayne Johnson | 2005-07-05 |
| 6894769 | Monitoring erosion of system components by optical emission | Audunn Ludviksson | 2005-05-17 |
| 6887341 | Plasma processing apparatus for spatial control of dissociation and ionization | Paul Moroz, Steven Fink | 2005-05-03 |
| 6872259 | Method of and apparatus for tunable gas injection in a plasma processing system | — | 2005-03-29 |