Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979954 | Inter-stage plasma source | Wayne Johnson | 2005-12-27 |
| 6899527 | Closed-drift hall effect plasma vacuum pump for process reactors | Samuel Antley, Andrej Mitrovic | 2005-05-31 |
| 6885153 | Plasma processing apparatus and method | — | 2005-04-26 |
| 6873113 | Stand alone plasma vacuum pump | Raphael A. Dandl | 2005-03-29 |