Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965287 | Low reflection microwave window | — | 2005-11-15 |
| 6962664 | Controlled method for segmented electrode apparatus and method for plasma processing | — | 2005-11-08 |
| 6958484 | Method and apparatus for 2-d spatially resolved optical emission and absorption spectroscopy | — | 2005-10-25 |
| 6917204 | Addition of power at selected harmonics of plasma processor drive frequency | Jovan Jevtic, Richard Parsons, Murray D. Sirkis | 2005-07-12 |
| 6899527 | Closed-drift hall effect plasma vacuum pump for process reactors | Bill Quon, Samuel Antley | 2005-05-31 |
| 6863020 | Segmented electrode apparatus for plasma processing | Wayne Johnson | 2005-03-08 |