Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6917204 | Addition of power at selected harmonics of plasma processor drive frequency | Andrej Mitrovic, Jovan Jevtic, Richard Parsons | 2005-07-12 |
| 6891124 | Method of wafer band-edge measurement using transmission spectroscopy and a process for controlling the temperature uniformity of a wafer | Medona B. Denton, Wayne Johnson | 2005-05-10 |
| 6861844 | Electron density measurement and plasma process control system using changes in the resonant frequency of an open resonator containing the plasma | Joseph T. Verdeyen, Wayne Johnson | 2005-03-01 |