Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6917204 | Addition of power at selected harmonics of plasma processor drive frequency | Andrej Mitrovic, Jovan Jevtic, Murray D. Sirkis | 2005-07-12 |
| 6884635 | Control of power delivered to a multiple segment inject electrode | — | 2005-04-26 |