Issued Patents 2005
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972852 | Critical dimension analysis with simultaneous multiple angle of incidence measurements | Allan Rosencwaig | 2005-12-06 |
| 6963401 | Combination thermal wave and optical spectroscopy measurement systems | Minna Hovinen | 2005-11-08 |
| 6947850 | Real time analysis of periodic structures on semiconductors | Hanyou Chu | 2005-09-20 |
| 6934025 | Thin film optical measurement system and method with calibrating ellipsometer | Jeffrey T. Fanton, Craig E. Uhrich | 2005-08-23 |
| 6931361 | Real time analysis of periodic structures on semiconductors | Hanyou Chu | 2005-08-16 |
| 6922244 | Thin film optical measurement system and method with calibrating ellipsometer | Allan Rosencwaig | 2005-07-26 |
| 6894781 | Monitoring temperature and sample characteristics using a rotating compensator ellipsometer | Lanhua Wei, Allan Rosencwaig | 2005-05-17 |
| 6882424 | Systems and methods for evaluating semiconductor layers | Li-Yi Chen | 2005-04-19 |
| 6882421 | Apparatus for optical measurements of nitrogen concentration in thin films | Youxian Wen | 2005-04-19 |
| 6867866 | CD metrology analysis using green's function | Yia-Chung Chang, Hanyou Chu | 2005-03-15 |
| 6859281 | Method for determining ion concentration and energy of shallow junction implants | Minna Hovinen | 2005-02-22 |
| 6856385 | Spatial averaging technique for ellipsometry and reflectometry | Lanhua Wei, Hanyou Chu | 2005-02-15 |
| 6842259 | Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements | Allan Rosencwaig | 2005-01-11 |