Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972852 | Critical dimension analysis with simultaneous multiple angle of incidence measurements | Jon Opsal | 2005-12-06 |
| 6930771 | Optical inspection equipment for semiconductor wafers with precleaning | Lanhua Wei | 2005-08-16 |
| 6922244 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal | 2005-07-26 |
| 6894781 | Monitoring temperature and sample characteristics using a rotating compensator ellipsometer | Lanhua Wei, Jon Opsal | 2005-05-17 |
| 6842259 | Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements | Jon Opsal | 2005-01-11 |