Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930771 | Optical inspection equipment for semiconductor wafers with precleaning | Allan Rosencwaig | 2005-08-16 |
| 6894781 | Monitoring temperature and sample characteristics using a rotating compensator ellipsometer | Jon Opsal, Allan Rosencwaig | 2005-05-17 |
| 6870621 | Small spot ellipsometer | — | 2005-03-22 |
| 6856385 | Spatial averaging technique for ellipsometry and reflectometry | Hanyou Chu, Jon Opsal | 2005-02-15 |