Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6934025 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal, Craig E. Uhrich | 2005-08-23 |
| 6885019 | Sample positioning system to improve edge measurements | Craig E. Uhrich | 2005-04-26 |