Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6940596 | Refractive focusing element for spectroscopic ellipsometry | Jianhui Chen | 2005-09-06 |
| 6934025 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal, Jeffrey T. Fanton | 2005-08-23 |
| 6885019 | Sample positioning system to improve edge measurements | Jeffrey T. Fanton | 2005-04-26 |