YC

Yia-Chung Chang

TH Therma-Wave: 1 patents #19 of 34Top 60%
📍 Champaign, IL: #11 of 66 inventorsTop 20%
🗺 Illinois: #1,298 of 5,218 inventorsTop 25%
Overall (2005): #72,559 of 245,428Top 30%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6867866 CD metrology analysis using green's function Hanyou Chu, Jon Opsal 2005-03-15