Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908773 | ATR-FTIR metal surface cleanliness monitoring | Syun-Ming Jang, Chung-Chi Ko | 2005-06-21 |
| 6884659 | Thin interface layer to improve copper etch stop | Bi-Trong Chen, Syun-Ming Jang, Shu E Ku, Tien-I Bao, Lih-Ping Li | 2005-04-26 |
| 6878621 | Method of fabricating barrierless and embedded copper damascene interconnects | Zhen-Cheng Wu, Yung-Chen Lu, Syun-Ming Jang | 2005-04-12 |