Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962869 | SiOCH low k surface protection layer formation by CxHy gas plasma treatment | Tien-I Bao, Hsin-Hsien Lu, Lih-Ping Li, Aaron Song, Syun-Ming Jang | 2005-11-08 |
| 6924242 | SiOC properties and its uniformity in bulk for damascene applications | Syun-Ming Jang, Tien-I Bao, Lih-Ping Li, Al-Sen Liu | 2005-08-02 |
| 6908773 | ATR-FTIR metal surface cleanliness monitoring | Lain-Jong Li, Syun-Ming Jang | 2005-06-21 |
| 6867126 | Method to increase cracking threshold for low-k materials | Lih-Ping Li, Yung-Chen Lu | 2005-03-15 |