Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6874700 | Contamination control method and apparatus, and air-conditioning system of a substrate processing facility employing the same | Dong-Seok Ham, Hyun Joon Kim | 2005-04-05 |
| 6843257 | Wafer cleaning system | In-jun Yeo, Kyung-Hyun Kim, Jeong-Lim Nam, Byoung-Moon Yoon, Sang-rok Hah | 2005-01-18 |