Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946431 | Cleaning solution including aqueous ammonia solution, acetic acid and deionized water for integrated circuit devices and methods of cleaning integrated circuit devices using the same | In-joon Yeo, Yong-Sun Ko, In-Seak Hwang, Dae-Hyuk Chung, Kyung-Hyun Kim | 2005-09-20 |
| 6843257 | Wafer cleaning system | In-jun Yeo, Kyung-Hyun Kim, Jeong-Lim Nam, Hyun Ho Cho, Sang-rok Hah | 2005-01-18 |