Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843257 | Wafer cleaning system | In-jun Yeo, Kyung-Hyun Kim, Byoung-Moon Yoon, Hyun Ho Cho, Sang-rok Hah | 2005-01-18 |
| 6841338 | Photoresist composition and method of forming a photoresist pattern with a controlled remnant ratio | Dae-Youp Lee, Do-Yul Yoo, Jeung-woo Lee | 2005-01-11 |