Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933247 | Method for forming a minute pattern and method for manufacturing a semiconductor device using the same | Sung-Hwan Byun, Bong-Cheol Kim | 2005-08-23 |
| 6841338 | Photoresist composition and method of forming a photoresist pattern with a controlled remnant ratio | Jeong-Lim Nam, Do-Yul Yoo, Jeung-woo Lee | 2005-01-11 |