Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946431 | Cleaning solution including aqueous ammonia solution, acetic acid and deionized water for integrated circuit devices and methods of cleaning integrated circuit devices using the same | In-joon Yeo, In-Seak Hwang, Byoung-Moon Yoon, Dae-Hyuk Chung, Kyung-Hyun Kim | 2005-09-20 |
| 6889447 | Method for drying a wafer and apparatus for performing the same | Kwang-Wook Lee, In-Seak Hwang | 2005-05-10 |
| 6875706 | Cleaning solution and method of cleaning a semiconductor device using the same | Kwang-Wook Lee, Dae-Hyuk Chung, In-Seak Hwang | 2005-04-05 |
| 6838330 | Method of forming a contact hole of a semiconductor device | Bong-Ho Moon, Ju-Yun Cheol, In-Seak Hwang | 2005-01-04 |