Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975432 | Communication control system and method using communication network | — | 2005-12-13 |
| 6874700 | Contamination control method and apparatus, and air-conditioning system of a substrate processing facility employing the same | Dong-Seok Ham, Hyun Ho Cho | 2005-04-05 |