Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6874700 | Contamination control method and apparatus, and air-conditioning system of a substrate processing facility employing the same | Hyun Joon Kim, Hyun Ho Cho | 2005-04-05 |
DH
Dong-Seok Ham
Overall (2005): #210,337 of 245,428Top 90%
1
Patents 2005