Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6976902 | Chemical mechanical polishing apparatus | Ja-Eung Koo, Sung Bae Lee, Duk-Ho Hong, Sang-rok Hah, Hong-Seong Son | 2005-12-20 |
| 6960114 | Pad conditioner of CMP equipment | — | 2005-11-01 |
| 6930054 | Slurry composition for use in chemical mechanical polishing of metal wiring | Jae Seok Lee, Won Joong Do, Hyun Soo Roh, Kil Sung Lee, Bo-Un Yoon +3 more | 2005-08-16 |
| 6914001 | Chemical/mechanical polishing slurry, and chemical mechanical polishing process and shallow trench isolation process employing the same | Jae-Dong Lee, Bo-Un Yoon, Sang-rok Hah | 2005-07-05 |
| 6887130 | Chemical mechanical polishing apparatus | Chang-Ki Hong, Ho-Young Kim | 2005-05-03 |
| 6863592 | Chemical/mechanical polishing slurry and chemical mechanical polishing method using the same | Chang-Ki Hong, Jae-Dong Lee | 2005-03-08 |
| 6845049 | Semiconductor memory device including a delaying circuit capable of generating a delayed signal with a substantially constant delay time | Kyu-Nam Lim, Jei-Hwan Yoo, Young Gu Kang, Jae-Yoon Shim | 2005-01-18 |