Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6976902 | Chemical mechanical polishing apparatus | Ja-Eung Koo, Jong Won Lee, Sung Bae Lee, Sang-rok Hah, Hong-Seong Son | 2005-12-20 |
| 6924234 | Method and apparatus for polishing a copper layer and method for forming a wiring structure using copper | Ja-Hyung Han, Sang-rok Hah, Hong-Seong Son, Byung-Lyul Park | 2005-08-02 |