Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6914001 | Chemical/mechanical polishing slurry, and chemical mechanical polishing process and shallow trench isolation process employing the same | Jong Won Lee, Bo-Un Yoon, Sang-rok Hah | 2005-07-05 |
| 6887137 | Chemical mechanical polishing slurry and chemical mechanical polishing method using the same | Bo-Un Yoon, Yong-Pil Han | 2005-05-03 |
| 6875997 | Test patterns and methods of controlling CMP process using the same | Jeong-Heon Park, Bo-Un Yoon | 2005-04-05 |
| 6863592 | Chemical/mechanical polishing slurry and chemical mechanical polishing method using the same | Jong Won Lee, Chang-Ki Hong | 2005-03-08 |
| 6858452 | Method for isolating self-aligned contact pads | Jeong-Heon Park, Chang-Ki Hong, Young-rae Park, Ho-Young Kim | 2005-02-22 |
| 6855267 | Chemical mechanical polishing slurry | Bo-Un Yoon, Sang-rok Hah | 2005-02-15 |