Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930054 | Slurry composition for use in chemical mechanical polishing of metal wiring | Jae Seok Lee, Won Joong Do, Hyun Soo Roh, Kil Sung Lee, Jong Won Lee +3 more | 2005-08-16 |
| 6914001 | Chemical/mechanical polishing slurry, and chemical mechanical polishing process and shallow trench isolation process employing the same | Jong Won Lee, Jae-Dong Lee, Sang-rok Hah | 2005-07-05 |
| 6887137 | Chemical mechanical polishing slurry and chemical mechanical polishing method using the same | Jae-Dong Lee, Yong-Pil Han | 2005-05-03 |
| 6875997 | Test patterns and methods of controlling CMP process using the same | Jeong-Heon Park, Jae-Dong Lee | 2005-04-05 |
| 6855267 | Chemical mechanical polishing slurry | Jae-Dong Lee, Sang-rok Hah | 2005-02-15 |