Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953389 | Metal CMP slurry compositions that favor mechanical removal of oxides with reduced susceptibility to micro-scratching | Jae Seok Lee | 2005-10-11 |
| 6930054 | Slurry composition for use in chemical mechanical polishing of metal wiring | Jae Seok Lee, Won Joong Do, Hyun Soo Roh, Jong Won Lee, Bo-Un Yoon +3 more | 2005-08-16 |