Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955975 | Method for joining a silicon plate to a second plate | Frank Fischer, Ralf Hausner, Frieder Haag, Eckhard Graf, Markus Lutz | 2005-10-18 |
| 6936902 | Sensor with at least one micromechanical structure and method for production thereof | Stefan Pinter, Frank Henning, Hans Artmann, Helmut Baumann, Franz Laemer +2 more | 2005-08-30 |