Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972447 | Semiconductor component having a first earlier structure differing from a second earlier structure | Hubert Benzel, Frank Schaeffer | 2005-12-06 |
| 6936902 | Sensor with at least one micromechanical structure and method for production thereof | Frank Reichenbach, Stefan Pinter, Frank Henning, Helmut Baumann, Franz Laemer +2 more | 2005-08-30 |
| 6906392 | Micromechanical component | Hubert Benzel, Heribert Weber, Michael Bauer, Thorsten Pannek, Frank Schaefer +1 more | 2005-06-14 |