Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6906392 | Micromechanical component | Hubert Benzel, Heribert Weber, Michael Bauer, Hans Artmann, Thorsten Pannek +1 more | 2005-06-14 |
| 6840111 | Micromechanical component and pressure sensor having a component of this type | Hubert Benzel, Heribert Weber | 2005-01-11 |