Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936902 | Sensor with at least one micromechanical structure and method for production thereof | Frank Reichenbach, Stefan Pinter, Frank Henning, Hans Artmann, Helmut Baumann +2 more | 2005-08-30 |