Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955975 | Method for joining a silicon plate to a second plate | Frank Reichenbach, Frank Fischer, Ralf Hausner, Frieder Haag, Eckhard Graf | 2005-10-18 |
| 6952041 | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same | Aaron Partridge, Silvia Kronmueller | 2005-10-04 |
| 6939809 | Method for release of surface micromachined structures in an epitaxial reactor | Aaron Partridge | 2005-09-06 |
| 6940632 | Micromechanical structure, in particular for an acceleration sensor | Andreas Kipp, Siegbert Goetz | 2005-09-06 |
| 6936491 | Method of fabricating microelectromechanical systems and devices having trench isolated contacts | Aaron Partridge, Silvia Kronmueller | 2005-08-30 |
| 6928879 | Episeal pressure sensor and method for making an episeal pressure sensor | Aaron Partridge | 2005-08-16 |
| 6930367 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems | Aaron Partridge | 2005-08-16 |
| 6851744 | Roof module for a motor vehicle | Frank Niebuhr, Joachim Röder, Manfred Röhnke | 2005-02-08 |