Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6952041 | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same | Markus Lutz, Silvia Kronmueller | 2005-10-04 |
| 6939809 | Method for release of surface micromachined structures in an epitaxial reactor | Markus Lutz | 2005-09-06 |
| 6936491 | Method of fabricating microelectromechanical systems and devices having trench isolated contacts | Markus Lutz, Silvia Kronmueller | 2005-08-30 |
| 6928879 | Episeal pressure sensor and method for making an episeal pressure sensor | Markus Lutz | 2005-08-16 |
| 6930367 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems | Markus Lutz | 2005-08-16 |