Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955975 | Method for joining a silicon plate to a second plate | Frank Reichenbach, Frank Fischer, Ralf Hausner, Frieder Haag, Markus Lutz | 2005-10-18 |
| 6951824 | Method for manufacturing a micromechanical component and a component that is manufactured in accordance with the method | Frank Fischer, Peter Hein | 2005-10-04 |
| 6876048 | Micromechanical component as well as a method for producing a micromechanical component | Frank Fischer, Peter Hein | 2005-04-05 |