Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955975 | Method for joining a silicon plate to a second plate | Frank Reichenbach, Ralf Hausner, Frieder Haag, Eckhard Graf, Markus Lutz | 2005-10-18 |
| 6951824 | Method for manufacturing a micromechanical component and a component that is manufactured in accordance with the method | Peter Hein, Eckhard Graf | 2005-10-04 |
| 6905615 | Method of manufacturing a micromechanical component | Wilhelm Frey, Udo Bischof, Lars Metzger | 2005-06-14 |
| 6876048 | Micromechanical component as well as a method for producing a micromechanical component | Peter Hein, Eckhard Graf | 2005-04-05 |
| 6867061 | Method for producing surface micromechanical structures, and sensor | Wilhelm Frey, Lars Metzger | 2005-03-15 |