Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960536 | Method for producing integrated microsystems | Franz Laermer, Christoph Duenn | 2005-11-01 |
| 6905615 | Method of manufacturing a micromechanical component | Frank Fischer, Udo Bischof, Lars Metzger | 2005-06-14 |
| 6901800 | Differential in-plane tunneling current sensor | Andreas Niendorf, Zhiyu Pan | 2005-06-07 |
| 6895818 | Differential in-plane tunneling current sensor | Andreas Niendorf, Zhiyu Pan | 2005-05-24 |
| 6867061 | Method for producing surface micromechanical structures, and sensor | Frank Fischer, Lars Metzger | 2005-03-15 |
| 6856067 | Device and method for electrostatically levitating a disk and method for using an electrostatic levitated disk as a sensor | Zhiyu Pan, Andreas Niendorf | 2005-02-15 |