Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974709 | Method and device for providing a semiconductor etching end point and for detecting the end point | Klaus Breitschwerdt | 2005-12-13 |
| 6960536 | Method for producing integrated microsystems | Wilhelm Frey, Christoph Duenn | 2005-11-01 |
| 6926844 | Plasma etching method having pulsed substrate electrode power | Andrea Schilp | 2005-08-09 |
| 6911348 | Device and method for determining the lateral undercut of a structured surface layer | Volker Becker, Andrea Schilp | 2005-06-28 |
| 6899817 | Device and method for etching a substrate using an inductively coupled plasma | Volker Becker, Andrea Schilp | 2005-05-31 |
| 6874511 | Method of avoiding or eliminating deposits in the exhaust area of a vacuum system | Bernd Kutsch | 2005-04-05 |