Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6926844 | Plasma etching method having pulsed substrate electrode power | Franz Laermer | 2005-08-09 |
| 6911348 | Device and method for determining the lateral undercut of a structured surface layer | Volker Becker, Franz Laermer | 2005-06-28 |
| 6899817 | Device and method for etching a substrate using an inductively coupled plasma | Volker Becker, Franz Laermer | 2005-05-31 |