Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905615 | Method of manufacturing a micromechanical component | Frank Fischer, Wilhelm Frey, Udo Bischof | 2005-06-14 |
| 6867061 | Method for producing surface micromechanical structures, and sensor | Frank Fischer, Wilhelm Frey | 2005-03-15 |