Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6945854 | Semiconductor device fabrication method and apparatus | Nobuyuki Kurashima | 2005-09-20 |
| 6935928 | Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method | Kazuhito Uchikura, Kazuo Nishimoto, Masayuki Hattori, Nobuo Kawahashi, Hiroyuki Yano +3 more | 2005-08-30 |
| 6924227 | Slurry for chemical mechanical polishing and method of manufacturing semiconductor device | Hiroyuki Yano, Nobuyuki Kurashima, Nobuo Kawahashi, Masayuki Hattori, Kazuo Nishimoto | 2005-08-02 |
| 6897143 | Method of manufacturing semiconductor device including two-step polishing operation for cap metal | Hiroshi Toyoda, Hiroyuki Yano, Dai Fukushima, Tetsuo Matsuda, Hisashi Kaneko | 2005-05-24 |
| 6896590 | CMP slurry and method for manufacturing a semiconductor device | Hiroyuki Yano | 2005-05-24 |
| 6858539 | Post-CMP treating liquid and method for manufacturing semiconductor device | Yukiteru Matsui, Nobuyuki Kurashima, Hiroyuki Yano | 2005-02-22 |
| 6858936 | Semiconductor device having an improved construction in the interlayer insulating film | Dai Fukushima, Yoshikuni Tateyama, Hiroyuki Yano | 2005-02-22 |