Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6945854 | Semiconductor device fabrication method and apparatus | Gaku Minamihaba | 2005-09-20 |
| 6935928 | Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method | Kazuhito Uchikura, Kazuo Nishimoto, Masayuki Hattori, Nobuo Kawahashi, Hiroyuki Yano +3 more | 2005-08-30 |
| 6924227 | Slurry for chemical mechanical polishing and method of manufacturing semiconductor device | Gaku Minamihaba, Hiroyuki Yano, Nobuo Kawahashi, Masayuki Hattori, Kazuo Nishimoto | 2005-08-02 |
| 6858539 | Post-CMP treating liquid and method for manufacturing semiconductor device | Gaku Minamihaba, Yukiteru Matsui, Hiroyuki Yano | 2005-02-22 |